WoS SCIE Q1Scopus Q3SCImago #15,345CAS 4区Subscription

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Country: Updating•WoS SCIE Quartile: Q1•Scopus SJR: 0.359•SCImago Rank: #15,345•Identifier (ISSN):2166-2746(Print)/2166-2754(Online)•Articles / Year: 117•Estimated Publication Fee (APC): $2,754 USD

Clarivate JCR Index Advisory: Not Indexed in Latest JCR

Clarivate Impact Factor (IF 2024)Q1

N/A

Leading citation impact metric from Clarivate Journal Citation Reports

H-Index (Hirsch Index)

131

131 papers with at least that number of citations each

WoS: SCIE / JCRQ1

Self-Citation RateN/A

Safe Level (< 15%)Warning Level (> 20%)

Self-citation below 15% indicates strong scholarly independence.

Volume & Open AccessSubscription

117articles/year

0% Gold OA•0% Original Research

State Council for Professorship (HĐGSNN) Scoring

Quyết định số 26/QĐ-HĐGSNN ngày 11/7/2025 (Mục quốc tế)

1.00pts

Latest Max Score

Estimated (Dec 26)

Scoring Basis: WoS Q4

HĐGSNN Score History

By article publication year

Year	Max Score	Evaluation Details	Source
2025	1.00đ	WoS Q4	🔵 Computed
2024	1.00đ	WoS Q4(IF: 1.5)	🔵 Computed
2023	1.00đ	WoS Q4(IF: 0)	🔵 Computed

Note: Domestic journal scores are officially collected from annual HĐGSNN decisions across councils. International journal scores are dynamically computed according to Decision 26/QĐ-HĐGSNN based on quartile and citation metrics in the publication year.

Aims & Scope

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is a leading international peer-reviewed journal publishing original research, clinical updates, and reviews indexed in Clarivate Web of Science (SCIE) with Q1 quartile ranking.

Topics Covered (Recognized by AI)

Physics98.7%Materials science98.6%Quantum mechanics91.6%Chemistry88.1%Organic chemistry81.7%Nanotechnology79.4%Engineering79.1%Optoelectronics78.4%Composite material74.2%Optics57.7%Electrical engineering48.3%Layer (electronics)48.2%Metallurgy45.2%Biology33.8%Chemical engineering32.2%Computer science31.6%Nuclear physics29.7%Thermodynamics28.5%Medicine27.2%Condensed matter physics26.9%Pathology24.4%Chromatography24.3%Geology23.4%Physical chemistry23.3%Environmental chemistry22.6%Analytical Chemistry (journal)22.6%Alternative medicine21.6%Fabrication21.5%Mathematics21.4%

Primary Research Areas

Materials Science Materials Chemistry

Official Website NLM PubMed Catalog SCImago Profile

SCImago & Scopus Journal Intelligence

Global SCImago ranking, SJR prestige index, Scopus coverage, and societal policy impact

Rank #15,345Scopus Q3SCImago Profile

Scopus Coverage:1991-1992, 2009-2026

•

Scopus Broad Areas:Chemical EngineeringEngineeringMaterials SciencePhysics and Astronomy

Scopus Citation Rank (SJR)Q3

0.359

Weighted prestige citation metric per document indexed in the Scopus database.

Tứ phân vị: Scopus Q3

Scopus H-Index (2025)

131

Measures cumulative publication volume and citation impact.

Scopus Database Indexed (2025)

Citations / Doc (2 years)

1.55

Average citations received per document published in the 2-year window.

2-Year Citation Window

Estimated Publication Fee (APC)

$2,754 USD

Estimated Article Processing Charge for Open Access publication.

Chi phí ước tính / bài báo

Scopus 3-Year Publication & Citation Window

3-Year Citations829

3-Year Documents547

Citable Documents543

Aggregated from Scopus database across the 3-year SJR evaluation window.

Societal Impact & Inclusivity (SCImago)

Policy Citations (Overton)0

Citations in government and international policy documents

Female Author Rate23.6%

Percentage of female authors published in the journal

Real-world societal policy reach and author gender diversity tracked by SCImago.

Scopus Subject Categories

Condensed Matter PhysicsQ3

Electrical and Electronic EngineeringQ3

Electronic, Optical and Magnetic MaterialsQ3

InstrumentationQ3

Materials ChemistryQ3

Process Chemistry and TechnologyQ3

Surfaces, Coatings and FilmsQ3

Chinese Academy of Sciences (CAS) Classification

Major / minor zone classification and CAS Early Warning List history

Major Category (Broad Field):

4区 (Zone 4)Engineering & Technology

Minor Category (Specific Field):

4区ENGINEERING, ELECTRICAL & ELECTRONIC

CAS Early Warning List History:

Updated annually: 2020 – 2024

2020

Not warned

2021

Not warned

2022

Not warned

2023

Not warned

2024

Not warned

Publishing & Editorial Information

Detailed publisher, peer-review turnaround, and publication cycle specifications

Publisher Review Speed

Updating

Average time to first editorial decision

Online Publication Speed

Updating

Time from acceptance to online publication

Official Acceptance Rate

Updating

Manuscript acceptance rate confirmed by the publisher

Open Access Model

Subscription

OA publishing option or traditional subscription

Publisher

AVS Science and Technology Society

Publication Language

English

Frequency

Periodic

Indexing & Databases

ScopusPubMed

WoS Categories & Quartiles

Detailed JCR / JCI category rankings and quartile breakdown from Clarivate

Clarivate JCR

No WoS category details available for this journal.

Annual Historical Statistics & Publications

Track annual publication volume, total citations, and Impact Factor evolution

12 year

Year	Impact Factor	Articles / Year	Total Citations
2026	—	117	25
2025	—	182	237
2024	1.5	187	777
2023	0	190	745
2022	—	161	902
2021	—	157	987
2020	—	217	1,705
2019	—	253	2,576
2018	—	231	2,240
2017	—	260	3,009
2016	—	308	3,717
2015	—	274	2,815